EP1380871A2

Relaislinsengruppe in einem Beleuchtungssystem eines lithographischen Systems

Name: Optical design data for EP1380871A2 — Relaislinsengruppe in einem Beleuchtungssystem eines lithographischen Systems
Creator: Emil Aslanov

Publication number	EP1380871A2
Publication date	2004-01-14
Kind code	A2
CPC class	Not available
Data quality	AUTOMATED_EXTRACTION_UNREVIEWED
Effective focal length	Not available
F-number	Not available
Full field of view	Not available
Source	Espacenet record

Embodiments (1)

#	Label	Extraction	Surfaces
0	table_001	EXTRACTED	19

Lens Gate · created by Emil Aslanov · data snapshot 2026-10-31. Bibliographic data and lens tables originate from official European Patent Office publications. Extraction, conversion and review by the Lens Gate project.