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EP2017662A2

Katadioptrisches System für die Scatterometrie

Publication numberEP2017662A2
Publication date2009-01-21
Kind codeA2
CPC classNot available
Data qualityAUTOMATED_EXTRACTION_UNREVIEWED
Effective focal lengthNot available
F-numberNot available
Full field of viewNot available
SourceEspacenet record

Embodiments (1)

#LabelExtractionSurfaces
0table_007EXTRACTED16

Lens Gate · created by · data snapshot 2026-10-31. Bibliographic data and lens tables originate from official European Patent Office publications. Extraction, conversion and review by the Lens Gate project.