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EP2648027A1

PROJEKTIONSOBJEKTIVSYSTEM UND MIKROLITHOGRAPHIESYSTEM DAMIT

Publication numberEP2648027A1
Publication date2013-10-09
Kind codeA1
CPC classNot available
Data qualityAUTOMATED_EXTRACTION_UNREVIEWED
Effective focal lengthNot available
F-numberNot available
Full field of viewNot available
SourceEspacenet record

Embodiments (1)

#LabelExtractionSurfaces
0table_001EXTRACTED64

Lens Gate · created by · data snapshot 2026-10-31. Bibliographic data and lens tables originate from official European Patent Office publications. Extraction, conversion and review by the Lens Gate project.